Iterative compensation of nonlinear error of heterodyne interferometer
نویسندگان
چکیده
منابع مشابه
Error Analysis, Design and Modeling of an Improved Heterodyne Nano-Displacement Interferometer
A new heterodyne nano-displacement with error reduction is presented. The main errors affecting the displacement accuracy of the nano-displacement measurement system including intermodulation distortion error, cross-talk error, cross-polarization error and phase detection error are calculated. In the designed system, a He-Ne laser having three-longitudinal-mode is considered as the stabiliz...
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A new heterodyne nano-displacement with error reduction is presented. The main errors affecting the displacement accuracy of the nano-displacement measurement system including intermodulation distortion error, cross-talk error, cross-polarization error and phase detection error are calculated. In the designed system, a He-Ne laser having three-longitudinal-mode is considered as the stabilized s...
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Periodic nonlinearity (PNL) in displacement interferometers is a systematic error source that limits measurement accuracy. The PNL of coaxial heterodyne interferometers is highly influenced by the polarization state and orientation of the source frequencies. In this Letter, we investigate this error source and discuss two interferometer designs, designed at TU Delft, that showed very low levels...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2017
ISSN: 1094-4087
DOI: 10.1364/oe.25.004470